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   Russian

 

 

   IPTM RAS
   Chernogolovka
  
2017

 

   

 

 

Chernogolovka

Photo

Conference

 

Dear Sir/Madam, we are glad to inform you about the Conference on electron beam technology "CEBT-19", organized by Institute of Microelectronics Technology and High Purity Materials  RAS (IMT RAS) Chernogolovka and "Mikron" ompany Moscow, Zelenograd,  which will be held in Chernogolovka (Moscow district) from 30 September to 3 October 2019

 

List of sections  
 

Section 1. Characterization of semiconductor materials and structures.

Section 2. Characterization of materials and structures byTEM methods.

Section 3. Characterization of materials by SEM methods.

Section 4. Scanning probe microscopy, probe nanolithography and spectroscopy.

Section 5. Electronic and ion lithography.

Section 6. Electron - beam technologies: the creation of micro - and nanostructures,
              3D printing, electron beam welding, electron beam melting.

Section 7. New materials for microelectronics.

Section 8. Characterization of materials and structures by X-ray microscopy.

 

The Conference will be devoted to the analysis of the state of research and development in the field of electron and ion-beam technologies and their applications in lithography, surface nanostructuring and the production of materials for micro- and nanoelectronics. Questions of application of methods of electronic, X-ray and probe microscopy for the analysis of materials and structures of electronic equipment will also be considered. It is supposed to hear reports about new research and development carried out in the laboratories of institutes of the RAS and higher educational institutions, and discuss the problems of diagnostics of materials and structures facing scientists and engineers working in the electronics industry.

 

Conference program will be published later (pdf)

 

The Organizing Committee of the Conference invites leading Russian scientists in the field of electron microscopy, representatives of the Russian industry dealing with the design and production of electron probe equipment, and graduates of Russian high schools showing interest to electron microscopy. Foreign scientists wishing to participate in the Conference on electron beam technology for microelectronics "CEBT 19", and  representatives of foreign firms are also kindly invited to the Conference.

 

Organizing Committee Conference 2019:

 

     Krasnikov G.Ya. - Academician of the RAS, "Micron", Moscow, Zelenograd - the cochairman
    
Yakimov E.B. - Doctor of Physical and Mathematical Sciences, IMT RAS, Chernogolovka

                  - the cochairman

Gornev Ye.S. - Doctor of Technical Sciences, "Micron", Moscow, Zelenograd

                  - the deputy chairman

 

     Borodin A.V. - Doctor of Technical Sciences, "EZAN", Chernogolovka

     Kazmiruk V.V. - Doctor of Physical and Mathematical Sciences, IMT RAS, Chernogolovka

     Latyshev A.V. - Academician of the RAS, ISP SB RAS, Novosibirsk

     Lukichev V.F. - Corresponding member of the RAS, FTIAN, Moscow

     Nikitov S.A. - Corresponding member of the RAS, IRE RAS, Fryazino

     Osipov N.A. - IMT RAS, Chernogolovka

     Chaplygin Yu.A. - Academician of the RAS, National Research University of
                             Electronic Technology
, Zelenograd

Program committee:

Roshchupkin D.V. - Doctor of Physical and Mathematical Sciences, IMT RAS, Chernogolovka
                   - the chairman

Nikolaychik V.I. - Doctor of Physical and Mathematical Sciences, IMT RAS, Chernogolovka
                 the
deputy chairman

 

Borgart N.I. - Doctor of Physical and Mathematical Sciences, National Research University
              of Electronic Technology
, Zelenograd  

Kalnov V.A. - Doctor of Technical Sciences, FTIAN, Moscow

Knyazev M.A. - Doctor of Physical and Mathematical Sciences, IMT RAS, Chernogolovka

Maltsev P.P. - Doctor of Technical Sciences, ISVCPE RAS, Moscow

Nikolaychik V.I. - Doctor of Physical and Mathematical Sciences, IMT RAS, Chernogolovka

Rau E.I. - Doctor of Physical and Mathematical Sciences, Lomonosov Moscow State

              University (MSU), Moscow

Tolstikhina A.L. - Doctor of Physical and Mathematical Sciences, Federal Research
                   Center "Crystallography and Photonics" of the RAS,Moscow

Local Committee:

     Kazmiruk V.V. - Doctor of Physical and Mathematical Sciences, IMT RAS, Chernogolovka
      the chairman

 

    Kazmiruk L.A - IMT RAS, Chernogolovka

    Korotitskiy V.I. - IMT RAS, Chernogolovka

    Osipova G.Yu. - IMT RAS, Chernogolovka

    Savitskaya T.N. - IMT RAS, Chernogolovka

    Frolova O.A - IMT RAS, Chernogolovka

    Lavrova A. - IMT RAS, Chernogolovka

    Kurganov.I.G. - IMT RAS, Chernogolovka

    Podkopaev A.A - IIMT RAS, Chernogolovka

    Kozlov A.V. - IMT RAS, Chernogolovka

    Chichagova R.I. - IMT RAS, Chernogolovka

 

Venue

 

Conference on electron beam technology for microelectronics "CEBT 19" will be held in Chernogolovka (Moscow district), Akademika Osip'yana street, Building 6 (142432, Akademika Osip'yana str., bldg. 6, Chernogolovka, Moscow district, the Russian Federation).


Chernogolovka -
one of the scientific centers of Russia. Located 55 km from Moscow.
 

 

Abstracts

 

To prepare abstracts, you can use this template.

 

Please send abstracts of your scientific report  by mail giza@ipmt.ru (not by Fax). 

Attention!  Deadline for abstracts: 31 May , 2019

 

Registration


The information will be announced later.

 

If you are going to participate in the Conference, please, fill in the registration form.
 

Accommodation


Hotels in the city of Zelenograd. You should book a room on their own
.
 

Important Dates:

 

Registration starts on 1 March , 2019.
The deadline for the acceptance of abstracts is 31 May , 2019.

         

Contact Address:

 

V.V. Kazmiruk - deputy-chairman

E-mail: kazmiruk@iptm.ru  
giza@ipmt.ru

 

Visa Application

 

Dear colleagues, the Organizing committee does not apply for visas.
 

Conference organizers   

 

 

Institute of Microelectronics Technology
and High Purity Materials  Russian academy of scinceChernogolovka  
  "Mikron" ompany Moscow, Zelenograd

 

 

 

Sponsor Conference 2019

 

 


For problems, suggestions, or questions, please contact: 

 

Dr. V.V. Kazmiruk

L.A. Kazmiruk

 
IMT RUS,
Chernogolovka,
Moscow district, 
142432, Russia  
kazmiruk@iptm.ru

IMT RUS,
Chernogolovka,
Moscow district, 
142432, Russia  
giza@ipmt.ru

 

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Institute of Microelectronics Technology and High Purity Materials  RAS
Last updated: 02.08.19