List
of sections
Section 1. Characterization of
semiconductor materials and structures.
Section 2. Characterization
of materials and structures
byTEM methods.
Section 3.
Characterization of
materials by SEM methods.
Section 4.
Scanning probe microscopy, probe nanolithography and
spectroscopy.
Section 5.
Electronic and ion lithography.
Section 6.
Electron - beam technologies: the creation of micro - and
nanostructures,
3D printing, electron beam welding, electron beam melting.
Section 7. New materials
for
microelectronics.
Section 8. Characterization of
materials and structures by X-ray microscopy.
The
Conference will be devoted to the analysis of the state of
research and development in the field of electron and ion-beam
technologies and their applications in lithography, surface
nanostructuring and the production of materials for micro- and
nanoelectronics. Questions of application of methods of
electronic, X-ray and probe microscopy for the analysis of
materials and structures of electronic equipment will also be
considered. It is supposed to hear reports about new research
and development carried out in the laboratories of institutes of
the RAS and higher educational institutions, and discuss the
problems of diagnostics of materials and structures facing
scientists and engineers working in the electronics industry.
Conference program
will be published
later (pdf)
The Organizing Committee
of the
Conference invites leading Russian
scientists in the field of electron microscopy,
representatives of the Russian industry
dealing with the design and production of electron probe equipment, and graduates of
Russian high schools showing interest to electron microscopy. Foreign
scientists wishing to participate in the
Conference
on
electron beam technology for microelectronics
"CEBT 19", and representatives of foreign firms are
also kindly invited to the
Conference.
Organizing
Committee Conference 2019:
Krasnikov G.Ya. -
Academician of the RAS,
"Micron", Moscow, Zelenograd -
the cochairman
Yakimov E.B. -
Doctor of Physical
and Mathematical Sciences,
IMT
RAS,
Chernogolovka
-
the cochairman
Gornev Ye.S.
-
Doctor of Technical Sciences,
"Micron", Moscow, Zelenograd
- the
deputy chairman
Borodin A.V. -
Doctor of Technical Sciences,
"EZAN", Chernogolovka
Kazmiruk V.V. -
Doctor of Physical and
Mathematical Sciences,
IMT
RAS,
Chernogolovka
Latyshev A.V. -
Academician of the
RAS, ISP SB RAS, Novosibirsk
Lukichev V.F. -
Corresponding
member of the RAS,
FTIAN, Moscow
Nikitov S.A. -
Corresponding member of the RAS, IRE RAS,
Fryazino
Osipov
N.A. - IMT RAS, Chernogolovka
Chaplygin Yu.A. -
Academician of the
RAS, National Research University of
Electronic Technology, Zelenograd
Program
committee:
Roshchupkin D.V. -
Doctor of Physical
and Mathematical Sciences,
IMT
RAS, Chernogolovka
-
the chairman
Nikolaychik V.I. -
Doctor of Physical
and Mathematical Sciences, IMT
RAS, Chernogolovka
– the
deputy chairman
Borgart N.I. -
Doctor of Physical
and Mathematical Sciences, National Research University
of Electronic Technology, Zelenograd
Kalnov V.A. - Doctor of Technical Sciences,
FTIAN, Moscow
Knyazev M.A. -
Doctor of Physical
and Mathematical Sciences,
IMT
RAS, Chernogolovka
Maltsev P.P. - Doctor of
Technical Sciences, ISVCPE RAS, Moscow
Nikolaychik V.I. -
Doctor of Physical
and Mathematical Sciences, IMT
RAS, Chernogolovka
Rau E.I. -
Doctor of Physical
and Mathematical Sciences,
Lomonosov Moscow State
University
(MSU), Moscow
Tolstikhina A.L.
-
Doctor of Physical and Mathematical Sciences,
Federal Research
Center
"Crystallography and Photonics" of the RAS,Moscow
Local Committee:
Kazmiruk V.V. -
Doctor of Physical and
Mathematical Sciences,
IMT
RAS,
Chernogolovka
– the chairman
Kazmiruk L.A -
IMT
RAS,
Chernogolovka
Korotitskiy V.I. -
IMT
RAS,
Chernogolovka
Osipova G.Yu. -
IMT
RAS,
Chernogolovka
Savitskaya T.N. - IMT RAS, Chernogolovka
Frolova O.A -
IMT
RAS,
Chernogolovka
Lavrova A.
-
IMT
RAS,
Chernogolovka
Kurganov.I.G. -
IMT
RAS,
Chernogolovka
Podkopaev A.A - IIMT
RAS,
Chernogolovka
Kozlov A.V. -
IMT
RAS,
Chernogolovka
Chichagova R.I. -
IMT
RAS,
Chernogolovka
IPTM RAS
